Sr. Process Engineer, Epitaxy, Terafab

Sr. Process Engineer, Epitaxy, Terafab Tesla Motors, Inc. paid holidays, flex time, 401(k) United States, Texas, Austin May 05, 2026
What to Expect We are building Terafab, a vertically integrated semiconductor factory at an unprecedented scale. The facility houses logic, memory, packaging, test, and lithography mask production under one roof, optimized for rapid iteration and maximum compute density per square foot. Process engineering is where the discipline by which Terafab technology gets built, atom by atom, and dielectric films set the foundation for device performance. You will develop and own dielectric deposition processes across three distinct chip families: edge-inference processors, space-hardened data center AI chips for orbital satellites, and high-bandwidth memory. You'll optimize mechanical, chemical, and electrical properties of epitaxial thin films including but not limited to crystallinity, defectivity, strain/stress, doping, and contact resistivity while balancing thermal budgets and integration constraints across radically different product requirements. You should have deep expertise in dielectric deposition, but be ready to work across core process domains such as etch, clean, dielectric thin film, metallization, metrology, and thermal processing and integration engineers as integration evolves. This is a highly hands-on role at one of the most ambitious fab programs in the world. What You'll Do
Develop and qualify epitaxial CVD processes for nanosheet, channel, and S/D contact at 2nm and beyond nodes.
Characterize dielectric film properties-stress/strain, crystallinity/growth defect, deposition selectivity, etch rate, doping concentration, and contact resistance.
Own development for epitaxial films from tool installation and its continuous process/hardware improvement through HVM handoff for optimal productivity and yield
Qualify deposition tools from installation through production readiness, including chamber matching, particle control, and process window and stability qualification
Analyze process, property and structure from first principles-based approach to understand cause and effect mechanisms and to optimize key properties, not just recipes
Lead root cause analysis, establish inline metrology and SPC control strategies, and drive systematic yield improvement
Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues
Drive next-generation dielectric materials and process development What You'll Bring
Degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or related technical field, or equivalent experience
5+ years of hands-on epitaxial process/integration engineering experience in a semiconductor fab, especially plan options with $0 payroll deduction
Family-building, fertility, adoption and surrogacy benefits
Dental (including orthodontic coverage) and vision plans, both have options with a $0 paycheck contribution
Company Paid (Health Savings Accounts) HSA Contribution when enrolled in the High-Deductible medical plan with HSA
Healthcare and Dependent Care Flexible Spending Accounts (FSA)
401(k) with employer match, Employee Stock Purchase Plans, and other financial benefits
Company paid Basic Life, AD&D
Short-term and long-term disability insurance (90 day waiting period)
Employee Assistance Program
Sick and Vacation time (Flex time for salary positions, Accrued hours for Hourly positions), and Paid Holidays
Back-up childcare and parenting support resources
Voluntary benefits to include: critical illness, hospital indemnity, accident insurance, theft & legal services, and pet insurance
Weight Loss and Tobacco Cessation Programs
Tesla Babies program
Commuter benefits
Employee discounts and perks program